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Description: The AU Thermal ALD is strongly based on a Savannah system, which has become the preferred system for university researchers worldwide engaged in ALD and looking for an affordable yet robust platform. The Savannah’s efficient use of precursors and power-saving features substantially reduces the cost of operating a thin film deposition system.

Location: Broun Hall Cleanroom (moving to WERL Cleanroom soon)

Link to manufacturer information: Savannah ALD

Link to SOP: AU Thermal ALD SOP

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